300mm Wafer handling system.
Scope: Semiconductors industry.
- 300 [mm] wafer sizes.
- Repeatability of ±1µ.
- Robust design, self frequency of 250[Hz].
- Additional station for post measurement wafer.
- Capable to handle wafers in arbitrary orientation up to 3 [mm] of de-center.
- Wafer centering within 0.2 [mm] and 1 [mrad] for orientation.
- Compliance with clean-room class 10 standard.